IEC TS 62607-6-23:2025
Nanofabricación - Características clave de control - Parte 6-23: Productos relacionados con el grafeno - Resistencia laminar, densidad de portadores, movilidad de portadores: método de barra Hall

Estándar No.

IEC TS 62607-6-23:2025

Fecha de publicación

2025

Organización

International Electrotechnical Commission (IEC)

Ultima versión

IEC TS 62607-6-23:2025

Alcance

IEC TS 62607-6-23:2025, which is a Technical Specification, establishes a standardized method to determine the key control characteristic (KCC): • carrier mobility and sheet resistance for graphene thin films by: • Hall measurement. The carrier mobility is derived by the product of the Hall coefficient and the electric conductivity and the sheet resistance is derived by the product of the longitudinal resistance and the aspect ratio of a Hall device. • The method is applicable for graphene thin film Hall devices with length and width greater than 100 micrometers. The document is developed to complete the fabrication and measurement of devices using cost-effective processes and equipment. Due to the high cost and low cost-performance ratio of photolithography processes and equipment, this document does not utilize photolithography processes and equipment.

IEC TS 62607-6-23:2025 Historia

• 2025 IEC TS 62607-6-23:2025 Nanofabricación - Características clave de control - Parte 6-23: Productos relacionados con el grafeno - Resistencia laminar, densidad de portadores, movilidad de portadores: método de barra Hall

estándares y especificaciones